Three-dimensional step-height measurement using Mirau-type spectral interference microscope with acousto-optic tunable filter as frequency scanning device

Dalip Singh Mehta; Shohei Saito; Hideki Hinosugi; Mitsuo Takeda; Takashi Kurokawa

doi:10.1117/12.472218

20 June 2002 Three-dimensional step-height measurement using Mirau-type spectral interference microscope with acousto-optic tunable filter as frequency scanning device

Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, Takashi Kurokawa

Author Affiliations +

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472218
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We propose a non-mechanical scanning Mirau-type spectral interference microscopic imaging system for the measurement of three-dimensional step-height of discontinuous objects. In this system a superluminescent diode is used as a broad- band light source, and an acousto-optic tunable filter (AOTF) as a high-resolution frequency scanning device. The interferometric system was made unbalanced by putting the reference mirror position exactly half-way between the top and bottom of the total step-height of the discontinuous object. While scanning the frequency of the broad-band light source using AOTF, the interference fringes move in opposite directions on the top and bottom of the object, respectively. A two-dimensional Fourier transform method was used for the unique determination of the sign of fringe movement over a large area of the object without any photo- detectors and fringe counters. From the detected sign of the fringe movement and phase information, the three-dimensional step-height is measured. Experimental results of the measurement of 100 μm step-height are presented. The main advantages of the proposed system are non-mechanical scanning and large measurement range without ambiguity in the sign of phase.

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Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa "Three-dimensional step-height measurement using Mirau-type spectral interference microscope with acousto-optic tunable filter as frequency scanning device", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472218

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KEYWORDS

Interferometry

Microscopes

Mirrors

Objectives

Tunable filters

3D scanning

Acousto-optics

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