Twin-rainbow metrology

Charles L. Adler; James A. Lock; Brian R. Keating

doi:10.1117/12.472220

20 June 2002 Twin-rainbow metrology

Charles L. Adler, James A. Lock, Brian R. Keating

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472220
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In this document, we describe twin-rainbow metrology, a non-invasive optical technique for measurement of the thicknesses of thin solid and liquid films to sub-micron accuracy. TRM allows measurement of coating thicknesses in two separate ways: first, directly, by a measurement of the difference between two scattering angles; ; and second, by the analysis of a Moire pattern found in the superposition of two sets of interference fringes. In this paper we will examine the conditions under which twin-rainbow metrology can be used, the accuracy of measurements made by it, and its potential applications.

Citation Download Citation

Charles L. Adler, James A. Lock, and Brian R. Keating "Twin-rainbow metrology", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472220

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