19 June 2002 Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer
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Abstract
An external cavity diode laser is used as source for a frequency modulated continuous wave (FMCW) interferometer intended to determine absolute optical path differences (OPD) of up to 3mm with a target accuracy of 0.3 microns. This interferometer will eventually be paired with a heterodyne interferometer to extend the accuracy of the system to 0.1nm. Rather than using injection current modulation for the FMCW subsystem, the frequency sweep is provided by moving a mirror of the external cavity with a piezo element. A noise source analysis for this particular setup is provided, and estimates of the maximum attainable accuracy are made.
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Lukas Max Krieg, Lukas Max Krieg, Bas L. Swinkels, Bas L. Swinkels, Joseph J. M. Braat, Joseph J. M. Braat, } "Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473536; https://doi.org/10.1117/12.473536
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