In-plane displacement measurement using ESPI based on spatial fringe analysis method

Yasuhiko Arai; Shunsuke Yokozeki

doi:10.1117/12.473555

19 June 2002 In-plane displacement measurement using ESPI based on spatial fringe analysis method

Yasuhiko Arai, Shunsuke Yokozeki

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473555
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

The speckle interferometry is used to measure the shape of an object with a rough surface. In particular, the precise measurement can be easily performed with ESPI using fringe scanning technology. Then, the measurement accuracy is influenced with the ratio between the speckle size and the pixel size of a CCD. Sometimes, this causes the problem concerning an optical dislocation. In this paper, an in-plane displacement is measured by the arrangement using the two collimated beams. The measurement is performed by ESPI technology with the spatial fringe analysis method under the optimal condition. The condition is discussed as the measurement parameters concerning the speckle's size and the passband of band pass filter. In the experiment of the measurement of in-plane displacement, the optimal condition can evade the problem of occurrence of optical displacements. At the same time, the precise measurement can be performed.

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Yasuhiko Arai and Shunsuke Yokozeki "In-plane displacement measurement using ESPI based on spatial fringe analysis method", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473555

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KEYWORDS

Bandpass filters

Image filtering

Speckle

Fringe analysis

Optical filters

Electronic filtering

Interference (communication)

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