19 June 2002 Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler
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Abstract
We describe techniques for measuring step heights between separated, nominally plane-parallel surface regions of a precision-engineered part. Our technique combines a broadband, 10-micron wavelength scanning interferometric profiler with a HeNe laser displacement gage. The infrared wavelength accommodates machined metal parts having a surface roughness in excess of what would be possible with a visible-wavelength interferometer. The combination of broadband interferometry, which removes fringe order ambiguity, with a laser displacement gage makes it possible to determine the relative heights of surfaces separated by several mm with a 2-σ uncertainty of 0.3 micron. We present the instrument theory, experimental implementation and results of instrument testing.
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Peter J. de Groot, Peter J. de Groot, Xavier Colonna de Lega, Xavier Colonna de Lega, David A. Grigg, David A. Grigg, } "Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473535; https://doi.org/10.1117/12.473535
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