Ultrasonic displacement measurement using self-mixing interferometry

Ming Wang; Shouping Nie; Dacheng Li

doi:10.1117/12.473549

19 June 2002 Ultrasonic displacement measurement using self-mixing interferometry

Ming Wang, Shouping Nie, Dacheng Li

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473549
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We describe a method for the ultrasonic displacement measurement in a small volume based on self-mixing effect in a laser diode. The interference signal (mode-hop signal) is modulated with injection variation and demodulated by signal analysis. The interference signal due to the vibration of a testing example under the ultrasonic excitation is used for a determination of the sound displacement. Self-mixing interferometer is used, because it is much simper than the conventional interferometers. Many optical elements like the beamsplitter, reference mirror, and external photodetector are not required. Theoretical analysis and experimental method are presented. The vibration of a PZT transducer-driven sample was measured with resolution of sub-micron.

Citation Download Citation

Ming Wang, Shouping Nie, and Dacheng Li "Ultrasonic displacement measurement using self-mixing interferometry", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473549

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