You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
11 November 2002Performance limits of ARS sensors based on CMOS photodiode array
Measuring the light scatter back from a coherently illuminated surface is a powerful and fast measurement method to observe surfaces and its properties. It opens the possibility to measure integral surface topography constants, material properties, surface defects and contamination.
In this paper the performance limits of the angle resolved light scatter sensor (ARS sensor) LARISSA (Large Dynamic Range Intelligent Scatter Sensor Approach) will be discussed and exemplified by using a technical application.
In the first part of the paper the experimental setup of the ARS sensor LARISSA will be considered.
In the second part of the paper the performance limitation of the ARS sensor LARISSA concerning particle detection will be derived based on
simulation and measurement results.
Finally a short overview is given about further development of the ARS sensor.
Thomas Rinder andHendrik Rothe
"Performance limits of ARS sensors based on CMOS photodiode array", Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); https://doi.org/10.1117/12.451738
The alert did not successfully save. Please try again later.
Thomas Rinder, Hendrik Rothe, "Performance limits of ARS sensor based on CMOS photodiode array," Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); https://doi.org/10.1117/12.451738