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11 November 2002 Performance limits of ARS sensors based on CMOS photodiode array
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Measuring the light scatter back from a coherently illuminated surface is a powerful and fast measurement method to observe surfaces and its properties. It opens the possibility to measure integral surface topography constants, material properties, surface defects and contamination. In this paper the performance limits of the angle resolved light scatter sensor (ARS sensor) LARISSA (Large Dynamic Range Intelligent Scatter Sensor Approach) will be discussed and exemplified by using a technical application. In the first part of the paper the experimental setup of the ARS sensor LARISSA will be considered. In the second part of the paper the performance limitation of the ARS sensor LARISSA concerning particle detection will be derived based on simulation and measurement results. Finally a short overview is given about further development of the ARS sensor.
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Thomas Rinder and Hendrik Rothe "Performance limits of ARS sensors based on CMOS photodiode array", Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002);

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