Power spectral density (PSD) in stitching interferometer

Yingjie Yu; Guopei Li

doi:10.1117/12.451843

22 October 2002 Power spectral density (PSD) in stitching interferometer

Yingjie Yu, Guopei Li

Proceedings Volume 4780, Surface Scattering and Diffraction for Advanced Metrology II; (2002) https://doi.org/10.1117/12.451843
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

For the optical components in high power laser system, there are some special demands, therefore, there are some peculiar needs in evaluating, for example the testing in middle frequency segment is emphasized. Considering these special demands, power spectral density (PSD) is used as one of the important evaluating parameters. The paper summarizes the meaning of utilizing PSD, its calculation and demarcation methods. For measurement instrument, the paper chooses stitching interferometer to realize the testing of the optics of large scale. In order to test the frequency distortion in stitching, the paper applies PSD as the compared parameter. The results testifies that stitching can not introduce additional frequency distortion.

Citation Download Citation

Yingjie Yu and Guopei Li "Power spectral density (PSD) in stitching interferometer", Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); https://doi.org/10.1117/12.451843

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