24 December 2002 Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation
Author Affiliations +
Abstract
An extreme ultra-violet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU[1] undulator radiation. The beam line was equipped with a monochromator for PDI measurement. To improve the converging performance of the undulator radiation, a new beam line suitable for PDI was designed. From the examination of monochromaticity required for PDI, the 0th-order light of the monochromator was used in the experiment. The higher-order radiation of the undulator was eliminated by the reflection band of the Mo/Si multilayer mirrors. By means of improvements of the pre-alignment method and of the mask structure, a higher contrast than ever was achieved in the interference fringes.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masahito Niibe, Masahito Niibe, Mikihito Mukai, Mikihito Mukai, Takeshi Tanaka, Takeshi Tanaka, Katsumi Sugisaki, Katsumi Sugisaki, Yucong Zhu, Yucong Zhu, Yoshio Gomei, Yoshio Gomei, } "Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation", Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); doi: 10.1117/12.451354; https://doi.org/10.1117/12.451354
PROCEEDINGS
8 PAGES


SHARE
Back to Top