Status of small d-spacing x-ray multilayer development at Osmic

Yuriy Ya. Platonov; Luis Gomez; David Broadway

doi:10.1117/12.451345

24 December 2002 Status of small d-spacing x-ray multilayers development at Osmic

Yuriy Ya. Platonov, Luis Gomez, David Broadway

Proceedings Volume 4782, X-Ray Mirrors, Crystals, and Multilayers II; (2002) https://doi.org/10.1117/12.451345
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

The deposition and X-ray performance of multilayer structures with d-spacings ranging from 1.2nm to 3.5nm has been presented. Different pairs of materials such as W (Mo, Ni, Cr, and La)/B₄C, Ni (Cr, Co, V)/C have been considered. X-ray reflectivity of the multilayers has been measured in the photon energy range from ~0.18keV to ~100keV. W/B₄C structures with d~1.5nm showed reflectivity greater than 30% at Cu-K_α(E~8keV). Performance of a W/B₄C structure with d~1.5nm has been compared with TIAP crystal performance in analysis of Si-K_α (1.74keV), Al-K_α(1.5keV), Mg-K_α(1.25keV) and Na-K_α(1.04keV) radiation. Results showed that small d-spacing multilayers can be considered for TIAP crystal replacement in Wavelength Dispersive X-Ray Fluorescence (WDXRF) spectrometers. The absolute reflectivity of near normal incidence structures at O-K_α(~293eV), C-K_α (~277eV) and B-K_α(~183eV) radiation lines has been measured to be ~1.5%, 14% and 43% respectively with spectral resolution of up to ~0.6%.

Citation Download Citation

Yuriy Ya. Platonov, Luis Gomez, and David Broadway "Status of small d-spacing x-ray multilayers development at Osmic", Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); https://doi.org/10.1117/12.451345

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available