Saw-tooth refractive x-ray optics with sub-micron resolution

Bjorn Cederstrom; Carolina Ribbing; Mats Lundqvist

doi:10.1117/12.452288

21 November 2002 Saw-tooth refractive x-ray optics with sub-micron resolution

Bjorn Cederstrom, Carolina Ribbing, Mats Lundqvist

Proceedings Volume 4783, Design and Microfabrication of Novel X-Ray Optics; (2002) https://doi.org/10.1117/12.452288
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Saw-tooth refractive x-ray lenses have been used to focus a synchrotron beam to sub-μm line width. These lenses are free from spherical aberration and work in analogy with 1-D focusing parabolic compound refractive lenses. However, the focal length can be varied by a simple mechanical procedure. Silicon lenses were fabricated by wet anisotropic etching, and epoxy replicas were molded from the silicon masters. Theses lenses provided 1-D intensity gains up to a factor of 40 and the smallest focal line width was 0.74 μm, very close to the theoretical expectation. Two crossed lenses were put in series to obtain 2-D focusing and the 80 μm by 275 μm source was imaged to 1.0 μm by 5.4 μm. Beryllium lenses were fabricated using conventional computer-controlled milling. The focal line width was 1.7 μm, nearly 3 times larger than predicted by theory. This can be attributed to large surface roughness and a bent lens shape.

Citation Download Citation

Bjorn Cederstrom, Carolina Ribbing, and Mats Lundqvist "Saw-tooth refractive x-ray optics with sub-micron resolution", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.452288

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