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21 November 2002 X-ray lenses fabricated by deep x-ray lithography
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Abstract
Refractive x-ray lenses have been fabricated using deep x-ray lithography. Lenses were produced directly in 1- to 6-mm-thick sheets of polymethylmethacrylate (PMMA) with as many as 100 cylindrical lenses along the optical axis. The fabrication process consists of exposing the PMMA sheets to high-energy synchrotron radiation through a mask of 50-micron-thick gold on silicon, and subsequent development in ketone. The lenses are suitable for use in synchrotron radiation from a bending magnet at the Advanced Photon Source in the energy range of 8-16 KeV. Results of measurements of focus quality, flux density gain, and scatter are presented and discussed with regard to the quality of lens material and fabrication method. Means for improving the performance of the lenses is discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Derrick C. Mancini, Nicolaie A. Moldovan, Ralu Divan, Francesco DeCarlo, and Judith Yaeger "X-ray lenses fabricated by deep x-ray lithography", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.451021
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