Excimer laser processing for integrated gamma-ray detectors

Atsushi Nakamura; Madan Niraula; Koji Asano; Toru Aoki; Yoshinori Hatanaka

doi:10.1117/12.455779

10 January 2003 Excimer laser processing for the integrated gamma-ray detectors

Atsushi Nakamura, Madan Niraula, Koji Asano, Toru Aoki, Yoshinori Hatanaka

Proceedings Volume 4784, X-Ray and Gamma-Ray Detectors and Applications IV; (2003) https://doi.org/10.1117/12.455779
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Selective operation of laser doping process and laser ablation process using KrF excimer laser irradiation (wavelength 248nm, pulse duration 20ns) was carried out that is used for fabricating an integrated gamma-ray imaging detector. At high vacuumed condition, laser irradiated surface region is heated up to ablated. At high-pressure condition, ablation is suppressed and impurity on the surface was melt and diffuse into the CdTe substrate. We have fabricated an integrated imaging detector using above combination process. The detector showed low leakage current at room temperature and good gamma-ray detection property.

Citation Download Citation

Atsushi Nakamura, Madan Niraula, Koji Asano, Toru Aoki, and Yoshinori Hatanaka "Excimer laser processing for the integrated gamma-ray detectors", Proc. SPIE 4784, X-Ray and Gamma-Ray Detectors and Applications IV, (10 January 2003); https://doi.org/10.1117/12.455779

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