15 November 2002 Recent advances in optical MEMS devices and systems
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Abstract
We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.
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Pamela Rae Patterson, Pamela Rae Patterson, Dooyoung Hah, Dooyoung Hah, Mark M. C. Lee, Mark M. C. Lee, Jui Che Tsai, Jui Che Tsai, Ming C. Wu, Ming C. Wu, } "Recent advances in optical MEMS devices and systems", Proc. SPIE 4788, Photonic Devices and Algorithms for Computing IV, (15 November 2002); doi: 10.1117/12.453712; https://doi.org/10.1117/12.453712
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