Recent advances in optical MEMS devices and systems

Pamela Rae Patterson; Dooyoung Hah; Mark M. C. Lee; Jui Che Tsai; Ming C. Wu

doi:10.1117/12.453712

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15 November 2002 Recent advances in optical MEMS devices and systems

Pamela Rae Patterson, Dooyoung Hah, Mark M. C. Lee, Jui Che Tsai, Ming C. Wu

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Proceedings Volume 4788, Photonic Devices and Algorithms for Computing IV; (2002) https://doi.org/10.1117/12.453712
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.

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Pamela Rae Patterson, Dooyoung Hah, Mark M. C. Lee, Jui Che Tsai, and Ming C. Wu "Recent advances in optical MEMS devices and systems", Proc. SPIE 4788, Photonic Devices and Algorithms for Computing IV, (15 November 2002); https://doi.org/10.1117/12.453712

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