Paper
27 November 2002 Neural network applications in automated optical inspection: state of the arts
Hyungsuck Cho, Won Shik Park
Author Affiliations +
Abstract
Optical inspection techniques have been widely adopted in industrial areas since they provide fast and accurate information on product quality, process status, and machine conditions. The technologies include sensing using vision, laser scattering and imaging, x-ray imaging, and other optical sensing, and data processing for classification and recognition problems. Frequently, data processing tasks are very difficult, which is mainly due to the large volume, the complexity, and the noise of the raw data acquired. Artificial neural networks have been proven to be an effective means to cope with the problems difficult to solve or inefficient to solve by convectional methodologies. This paper presents the applications of neural networks in optical inspection tasks. Among the variety of industrial areas, this paper focuses on the inspection tasks involved in printed circuit board manufacturing processes and semiconductor manufacturing processes, which are the most competing industries in the world today. In this paper, the inspection problems are addressed and the optical techniques together with neural networks to solve such problems are reviewed. The application cases to which neural networks are applied are also presented with their effects.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hyungsuck Cho and Won Shik Park "Neural network applications in automated optical inspection: state of the arts", Proc. SPIE 4789, Algorithms and Systems for Optical Information Processing VI, (27 November 2002); https://doi.org/10.1117/12.455971
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Cited by 3 scholarly publications.
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KEYWORDS
Inspection

Neural networks

Semiconducting wafers

Optical inspection

Manufacturing

Defect detection

Image classification

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