5 December 2002 Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications
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Abstract
Columnar Ba0.8Sr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1 × 10-4 C/m2K at room temperature, and a leakage current of 1.42 × 10-7 A/cm2 under 100 kV/cm electrical field. The Ba0.8Sr0.2TiO3 films have been used for fabricating a 1 × 16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500 × 300 μm2 have a detectivity of 2.3 × 108 cmHz½W-1 at 23°C and 35 Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8Sr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.
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Jian-Gong Cheng, Jian-Gong Cheng, Jun Tang, Jun Tang, Junhao Chu, Junhao Chu, } "Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications", Proc. SPIE 4795, Materials for Infrared Detectors II, (5 December 2002); doi: 10.1117/12.451911; https://doi.org/10.1117/12.451911
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