4 November 2002 Electrostatically deformable microfrequency selective surface
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Abstract
This document describes the combination of frequency selective surfaces (FSS) with deformable MEMS membranes to form a one-by-two optical switch.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. MacDonald, Robert J. MacDonald, Karl Borhinger, Karl Borhinger, Joel Rieter, Joel Rieter, Paul L. Gassman, Paul L. Gassman, Bill Dietze, Bill Dietze, John Sahr, John Sahr, } "Electrostatically deformable microfrequency selective surface", Proc. SPIE 4809, Nanoscale Optics and Applications, (4 November 2002); doi: 10.1117/12.453774; https://doi.org/10.1117/12.453774
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