4 November 2002 Electrostatically deformable microfrequency selective surface
Author Affiliations +
This document describes the combination of frequency selective surfaces (FSS) with deformable MEMS membranes to form a one-by-two optical switch.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. MacDonald, Robert J. MacDonald, Karl Borhinger, Karl Borhinger, Joel Rieter, Joel Rieter, Paul L. Gassman, Paul L. Gassman, Bill Dietze, Bill Dietze, John Sahr, John Sahr, } "Electrostatically deformable microfrequency selective surface", Proc. SPIE 4809, Nanoscale Optics and Applications, (4 November 2002); doi: 10.1117/12.453774; https://doi.org/10.1117/12.453774


Double-sided MEMS mirror for L-switching matrix
Proceedings of SPIE (January 14 2003)
Capacitive rf MEMS switch with composite beam
Proceedings of SPIE (September 09 2002)
Low loss SPDT metal to metal contacts RF MEMS switch...
Proceedings of SPIE (January 05 2006)
A study on high isolation RF MEMS switch
Proceedings of SPIE (February 06 2006)

Back to Top