Translator Disclaimer
Paper
4 November 2002 Electrostatically deformable microfrequency selective surface
Author Affiliations +
Abstract
This document describes the combination of frequency selective surfaces (FSS) with deformable MEMS membranes to form a one-by-two optical switch.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. MacDonald, Karl Borhinger, Joel Rieter, Paul L. Gassman, Bill Dietze, and John Sahr "Electrostatically deformable microfrequency selective surface", Proc. SPIE 4809, Nanoscale Optics and Applications, (4 November 2002); https://doi.org/10.1117/12.453774
PROCEEDINGS
13 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Compact and high-accuracy RF MEMS capacitive series devices
Proceedings of SPIE (January 22 2005)
Double-sided MEMS mirror for L-switching matrix
Proceedings of SPIE (January 15 2003)
A study on high isolation RF MEMS switch
Proceedings of SPIE (February 07 2006)
Silicon surface micromachining over active devices
Proceedings of SPIE (September 29 1999)

Back to Top