Progress of ICC Alpha-Cell microbolometer development program

Kevin Charles Liddiard; Jonathan P. Knauth; Ryan Decker; Bruce Altermus; Bai Xu; Nigel Robinson

doi:10.1117/12.451217

23 January 2003 Progress of ICC α-cell microbolometer development program

Kevin Charles Liddiard, Jonathan P. Knauth, Ryan Decker, Bruce Altermus, Bai Xu, Nigel Robinson

Proceedings Volume 4820, Infrared Technology and Applications XXVIII; (2003) https://doi.org/10.1117/12.451217
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In a previous paper to the present forum we outlined the Infrared Components Corporation (ICC) microbolometer development program based on technology licensed from the Australian Defence Science and Technology Organisation (DSTO). We presented an overview of the processing technology and discussed the technology transfer package being developed for implementation in a silicon MEMS foundry. In this paper the progress of the program will be reported, including work at DSTO and Electro-optic Sensor Design (EOSD), and technology transfer to the 200mm MEMS foundry at the SUNY Albany Institute of Materials (UAIM). The development of a new readout integrated circuit (ROIC) and associated camera initiatives at ICC will be discussed.

Citation Download Citation

Kevin Charles Liddiard, Jonathan P. Knauth, Ryan Decker, Bruce Altermus, Bai Xu, and Nigel Robinson "Progress of ICC α-cell microbolometer development program", Proc. SPIE 4820, Infrared Technology and Applications XXVIII, (23 January 2003); https://doi.org/10.1117/12.451217

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