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22 May 2002 Laser Doppler vibrometry for optical MEMS
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Proceedings Volume 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2002) https://doi.org/10.1117/12.468168
Event: Fifth International Conference on Vibration Measurements by Laser Techniques, 2002, Ancona, Italy
Abstract
The use of Laser Doppler Vibrometer (LDV) technology has been at the fore front of Micro Electro-Mechanical Systems (MEMS) research since the early 1990's. The art of the technology has culminated in our latest Micro Scanning Vibrometer (MSV) system for automated scan measurements on MEMS. One MEMS application driving our product development is the use for testing optical MEMS devices, such as optical switches used in the telecommunications industry. To exemplify this, we present measurements made in collaboration with Applied MEMS on their MEMS DuraScanTM mirror. For Applied MEMS, LDV characterization was important for validating the design intent for two-axis rotation of a single-gimbaled structure. Scan measurements reveal distinct, isolated rotational modes about x- and y-axes that can be used to constrain mirror motion in either direction. A key feature of the LDV is that it measures real-time transient response in typical operating conditions where both electrical and mechanical effects are present. Characterization of settling time performance shows that the mirror can be optimized for fast, accurate beam steering needed for applications like optical switching.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric M. Lawrence, Kevin Speller, and Duli Yu "Laser Doppler vibrometry for optical MEMS", Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); https://doi.org/10.1117/12.468168
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