22 May 2002 Reducing the mechanical hysteresis problem in optically addressed diaphragm pressure sensors
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Proceedings Volume 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2002) https://doi.org/10.1117/12.468141
Event: Fifth International Conference on Vibration Measurements by Laser Techniques, 2002, Ancona, Italy
Abstract
Mechanical hysteresis problems associated with pressure sensors based on interferometric measurements of diaphragm deflection are discussed. The source and importance of each contribution to the net hysteresis is calculated and compared with experimental results. Possible methods to decrease hysteresis effects are presented. Based on these suggested methods, new sensors have been manufactured and their hysteresis evaluated. The results demonstrate that significant reductions in hysteresis can be achieved with minimum cost. Future sensor development will focus on materials selection and manufacturing methods to fully realize these improvements.
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S. A. Sharifian, S. A. Sharifian, D. R. Buttsworth, D. R. Buttsworth, } "Reducing the mechanical hysteresis problem in optically addressed diaphragm pressure sensors", Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468141; https://doi.org/10.1117/12.468141
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