19 November 2003 Diode sputtering: efficient technology for the production of laser coatings
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Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527614
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
This work reviews of our experimental studies of mirror production for the near ultraviolet spectral range. The optical coatings were fabricated by planar reactive sputtering of target surface in oxygen-argon medium. Multilayer mirrors deposited using simple cathode sputtering system are stable for laser radiation with improved optical properties compared with traditionally electron-beam evaporated coatings.
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N. D. Goldina, N. D. Goldina, } "Diode sputtering: efficient technology for the production of laser coatings", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.527614; https://doi.org/10.1117/12.527614
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