Fabrication of inductive grid filters for rejection of infrared radiation

Konstantins Jefimovs; Ville Kettunen; Marko Honkanen; Markku Kuittinen; Jari Pekka Turunen; Pasi Vahimaa; Matti Kaipiainen; Seppo Arvo Anter Nenonen; Marcos Bavdaz

doi:10.1117/12.524816

19 November 2003 Fabrication of inductive grid filters for rejection of infrared radiation

Konstantins Jefimovs, Ville Kettunen, Marko Honkanen, Markku Kuittinen, Jari Pekka Turunen, Pasi Vahimaa, Matti Kaipiainen, Seppo Arvo Anter Nenonen, Marcos Bavdaz

Author Affiliations +

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.524816
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

Inductive grid filters are analyzed and designed with the aim to reject infrared radiation with wavelength larger than one micrometer and to transmit shorter wavelengths. Experimental results on nickel and gold grids are presented. The grids are fabricated by a process involving electron beam lithography, reactive ion etching, and electroplating. Optical characterization results were compared to the calculations.

Citation Download Citation

Konstantins Jefimovs, Ville Kettunen, Marko Honkanen, Markku Kuittinen, Jari Pekka Turunen, Pasi Vahimaa, Matti Kaipiainen, Seppo Arvo Anter Nenonen, and Marcos Bavdaz "Fabrication of inductive grid filters for rejection of infrared radiation", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.524816

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available