19 November 2003 Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest
Author Affiliations +
Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527055
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
The "traditional" silicon planar technology, generating the field of micro-optics produces only a few shapes. To avoid that, many "non-conventional" technologies, based especially on photo-polymers, are investigating. This paper reports on some enhancements of such three technologies: LiGa, gray-tone lithography and embossing.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Niculae Dumbravescu, "Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.527055; https://doi.org/10.1117/12.527055
PROCEEDINGS
2 PAGES


SHARE
Back to Top