Interferometric absolute measurement of flatness along circles and their unification

Shohachi Sonozaki; Koichi Iwata; Yoshihisa Iwahashi

doi:10.1117/12.524827

19 November 2003 Interferometric absolute measurement of flatness along circles and their unification

Shohachi Sonozaki, Koichi Iwata, Yoshihisa Iwahashi

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.524827
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

Profile along a circle on precise mirror can be determined with no standard by measuring spacing between a mirror and another reference mirror. Accuracy of the reference mirror needs not be higher than that of the mirror to be measured. The absolute measurement based on this principle is made with a Fizeau interferometer. The result shows that the profile of a flat mirror can be measured in an accuracy of nm though the accuracy of reference mirror is in the order of μm. In order to extend this measurement to profile on a whole surface, we have to measure profiles along different circles and unify them. This unification does not seem to be done without a linear standard.

Citation Download Citation

Shohachi Sonozaki, Koichi Iwata, and Yoshihisa Iwahashi "Interferometric absolute measurement of flatness along circles and their unification", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.524827

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