Micro-fabricated spectral analysers

Omar Manzardo; Yves Petremand; Hans-Peter Herzig; Wilfried Noell; Nico F. de Rooij

doi:10.1117/12.530940

19 November 2003 Micro-fabricated spectral analysers

Omar Manzardo, Yves Petremand, Hans-Peter Herzig, Wilfried Noell, Nico F. de Rooij

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530940
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

We present several devices using different spectroscopic concepts. First, we show the successive steps and improvements in connection with the Michelson interferometer which we have already realized, in particular the use of fibers to bring in and collimate the light. A possible method to obtain micro-optical elements that are suitable for integration on the interferometer chip is proposed. Then, we present a lamellar grating interferometer, an array of commutable slits to realize a Hadamard transformer, and a movable curved diffraction grating. All of these devices have been realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology.

Citation Download Citation

Omar Manzardo, Yves Petremand, Hans-Peter Herzig, Wilfried Noell, and Nico F. de Rooij "Micro-fabricated spectral analysers", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530940

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