19 November 2003 Sol-gel hybrid channel waveguide fabrication using UV excimer laser patterning
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Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.525507
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
Definition of channel waveguides on hybrid sol-gel material was demonstrated using a 248 nm UV excimer laser, without mixing organic photoinitiators in the solution preparation step. Thin films fabricated by hydrolysis and polycondensation of methacryloxypropyltrimethoxysilane (MAPTMS) doped with zirconium oxide were deposited by spin-coating on soda-lime glass substrates (n = 1.514). Channel waveguides were defined by microlithography and then covered by a protective layer composed of a combination of MAPTMS and tetramethoxysilane (TMOS). Finally, after cutting and polishing, the waveguides were optically characterized.
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P. J. Moreira, P. J. Moreira, P. V.S. Marques, P. V.S. Marques, Antonio M. P. P. Leite, Antonio M. P. P. Leite, } "Sol-gel hybrid channel waveguide fabrication using UV excimer laser patterning", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.525507; https://doi.org/10.1117/12.525507
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