19 November 2003 Straightness measurement of a linear stage
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Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.531102
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
The straightness of a linear stage consists of three rotation angle errors and two lateral displacement errors. We show a novel straightness measurement system by using laser beams, simple optical components and position sensing devices.
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Koji Tenjimbayashi, Koji Tenjimbayashi, Hiromitsu Furukawa, Hiromitsu Furukawa, } "Straightness measurement of a linear stage", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); doi: 10.1117/12.531102; https://doi.org/10.1117/12.531102
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