19 February 2003 Characteristics of electric devices made by direct nanoparticle spraying
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486523
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
Metal nanoparticles films were prepared by a gas deposition technique couple with the nanosecond pulsed Nd:YAG laser ablation of two kinds of metal targets. Two generated nanoparticles were insitu mixed in the near space of the targets in the generation chamber and transported by a helium carrier gas to the deposition chamber and deposited on a substrate to form electric devices such as a resistor, a capacitor, wiring, etc., composed of nanoparticles composites. The electrical resistivity and capacity of the devices were measured. The relationship between the experimental conditions such as ambient pressure and laser fluences and the electrical properties of each device were analyzed. A heater was produced as an example of the application of a resistor.
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Eiichi Ozawa, Eiichi Ozawa, Yuji Kawakami, Yuji Kawakami, Toshinobu Yoshida, Toshinobu Yoshida, Masaru Iwashina, Masaru Iwashina, Kazutoshi Takahashi, Kazutoshi Takahashi, } "Characteristics of electric devices made by direct nanoparticle spraying", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486523; https://doi.org/10.1117/12.486523
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