19 February 2003 Deposition of LiNbO3 waveguide by pulsed-laser deposition
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486589
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
LiNbO3 thin films were deposited by pulsed-laser deposition (PLD) method. Crystalline and transparent films were deposited on sapphire substrates at 400 °C and in 100 mtorr of oxygen gas pressure. The waveguide properties, which were waveguide mode and loss, were measured by prism coupling method. Droplet less film was obtained with low ablation laser fluence and without scanning of ablation laser. The smallest waveguide loss was 32.9 dB/cm at present.
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Yoshiki Nakata, Soichiro Gunji, Youhei Shimizu, Tatsuo Okada, Mitsuo Maeda, "Deposition of LiNbO3 waveguide by pulsed-laser deposition", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486589; https://doi.org/10.1117/12.486589
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