19 February 2003 Development of low-absorption AR coatings for CO2 laser by ion assisted deposition
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486526
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
We have developed an anti-reflection (AR) coating technique designed for high power carbon dioxide (CO2) lasers that has low absorption and high resistance to humidity. This was achieved by performing ion-assisted deposition (IAD) using a Xe ion beam to apply BaF2 and ZnSe used as coating materials with extremely low bulk absorption coefficients. It was found that to achieve highly compact BaF2 thin films with low absorption on polycrystalline ZnSe substrates, both a surface flatness treatment using Xe ion bombardment and an optimized IAD condition of relatively low ion energy up to 200 eV are required. The absorption of the new (BaF2/ZnSe) AR coated ZnSe lens is 0.10 to 0.12%, approximately half that of conventional (ThF4/ZnSe) AR coated lenses. The new lens has both excellent anti-aging performance and a high resistance to humidity.
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Hiromi Iwamoto, Keiji Ebata, Hirokuni Nanba, "Development of low-absorption AR coatings for CO2 laser by ion assisted deposition", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486526; https://doi.org/10.1117/12.486526
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