Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser

Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda

doi:10.1117/12.486591

19 February 2003 Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486591
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Interfered femtosecond laser beams split by a diffractive optics was used to fabricate micro and cyclic structures. The process was done on the surface of samples, as polystyrene, slide glass, sapphire, and gold thin film. On each sample, a line of periodic dot structure with a period of about 6.25 μm was fabricated. The length of workpiece was 6 mm at maximum, and which is longest structure fabricated by a laser ablation using interfered femtosecond laser beams.

Citation Download Citation

Yoshiki Nakata, Tatsuo Okada, and Mitsuo Maeda "Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486591

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