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19 February 2003 Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486591
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
Interfered femtosecond laser beams split by a diffractive optics was used to fabricate micro and cyclic structures. The process was done on the surface of samples, as polystyrene, slide glass, sapphire, and gold thin film. On each sample, a line of periodic dot structure with a period of about 6.25 μm was fabricated. The length of workpiece was 6 mm at maximum, and which is longest structure fabricated by a laser ablation using interfered femtosecond laser beams.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshiki Nakata, Tatsuo Okada, and Mitsuo Maeda "Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486591; https://doi.org/10.1117/12.486591
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