19 February 2003 Fabrication of microchannels by UV laser ablation
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486566
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
This paper describes the fabrication of micro-channels in resin for micro-fluidic devices by a UV laser. Quartz wafers are coated with a 20μm thick BCB resin. Micro-grooves for micro-channels are fabricated into the BCB resin by a KrF excimer laser. The groove bottom is 100m wide at a pulse width of 20nsec, fluence of 1.3mJ/cm2/pulse, and overlap of 98.9%. The wafer surface serves as the bottom face of the groove. Moreover the side wall angle is 72°. Furthermore, the grooves are covered with laminate films to prevent leakage of the liquid samples. A thermoplastic film or a heat-hardening resin film is used as a laminate film. Laminating conditions are: roller temperatures of 120°C, pressure of 0.8MPa, and laminating speed of 0.2m/min. The thermoplastic film coats the groove perfectly. On the contrary, the heat-hardening film does not sag into the groove, resulting in an open-are cross-sectional ration of 80%. Furthermore, the open-area-ratio becomes 100% through a heat-curing process at a temperature of 120°C for 30min. The through holes are made in the laminate film by a KrF excimer laser. Inlet pipe for a micro-pump are inserted into the hole.
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Satoshi Takahashi, Satoshi Takahashi, Yoshimasa Suzuki, Yoshimasa Suzuki, Yoshikazu Yoshida, Yoshikazu Yoshida, "Fabrication of microchannels by UV laser ablation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486566; https://doi.org/10.1117/12.486566
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