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19 February 2003 Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486572
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
Nanometer-sized particles of silicon and titanium dioxide were generated by Nd:YAG laser ablation of solid substrates in a low pressure atmosphere. A low-pressure differential mobility analyzer (LP-DMA) was used to control the size of generated particles. The LP-DMA and a transmission electron microscopy (TEM) were used to measure the change in size distribution and morphology of nanoparticles with laser power and pressure. Finally, we succeeded to synthesize the almost spherical nanoparticles of 2-50 nm in diameter.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nobuhiro Aya, Seisuke Kano, Takafumi Seto, Makoto Hirasawa, Takaaki Orii, Kaname Sakiyama, and Hirofumi Shimura "Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486572
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