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19 February 2003 Laser-based technology of scanning near-field optical probes fabrication: study of kinetics and progress of measuring
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486565
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
Basic principles of laser assisted process of fiber etching for scanning near-field optical (SNO) probes formation and control technique are presented. The thermal and temporal regimes are considered in order to provide stable reproducibility and high quality of a tapered end of the optical fiber. Problems of adequate definition of the scanning imaging properties of a SNO probe are discussed. Thus an optical method of far-field registration and processing together with a new autoelectronic emission method are considered for solution of the task of a subwavelength SNO probe aperture measurement and estimation of its apparatus function.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vadim P. Veiko, Alexey I. Kalachev, Lev N. Kaporsky, Sergey A. Volkov, and Nikolay B. Voznesensky "Laser-based technology of scanning near-field optical probes fabrication: study of kinetics and progress of measuring", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486565
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