Nonlaminate microphotosterolithography using LCD live-motion mask

Hideaki Nishino; Takashi Miyoshi; Yasuhiro Takaya; Satoru Takahashi

doi:10.1117/12.486568

19 February 2003 Nonlaminate micro photo-sterolithography using LCD live-motion mask

Hideaki Nishino, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486568
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Photo-stereolithography is one of the most typical rapid prototyping and manufacturing technologies which enables to fabricate 3D objects easily, quickly and automatically from CAD drawings. For these advantages, it has been expected of application to the micromachining. But the conventional method is not suitable for such usage. Because it is based on the so-called laser scanning and laminating process that can’t achieve high accuracy and rapidness together. We propose a new photo-stereolithography method using a liquid crystal display (LCD) as the live-motion mask. Simultaneous exposure using the LCD live-motion mask makes it possible to precisely fabricate each layer at high speed without scanning. A complex 3D structure is fabricated by the continuous laminating of thin layers. Ideally, this method realizes the nonlaminate fabrication. In order to verify a feasibility of proposed method, we performed the fundamental experiments. As a result, the lateral resolution reached 5 μm. We fabricated the pyramidal shape and the bevel gear shape with both lateral and vertical resolution of 5 μm. Although the size was a few mm order, it took only about 20 minutes to finish fabricating. These experimental results show that the LCD live-motion mask method corresponding to the continuous laminating satisfies the two requirements of accuracy and rapidness.

Citation Download Citation

Hideaki Nishino, Takashi Miyoshi, Yasuhiro Takaya, and Satoru Takahashi "Nonlaminate micro photo-sterolithography using LCD live-motion mask", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486568

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