19 February 2003 Precision microfabrication with Q-switched CO2 lasers
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486600
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
This paper presents a new CO2 laser technology for precision microfabrication applications. The laser produces short (microsecond) pulses at very high pulse repetition frequencies (PRFs). In contrast, most commercial CO2-laser micromachining applications employ one of two type of CO2 lasers: RF-excited with external pulse modulation, and TEA lasers. The laser technology presented here produces pulses sharing some of the characteristics of the TEA CO2 laser, but is capable of delivering them at much higher PRFs (20-100 kHz). Microfabrication applications to date are primarily microdrilling in common electronic circuit board and IC packaging materials, including unreinforced, glass-fiber reinforced, and particle-filled epoxies. These materials are processed using pulse energies lower than those generally used by conventional CO2 laser designs, and at speeds typically 1.5 to three times as fast as achieved by conventional CO2 laser drills.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Corey M. Dunsky, Corey M. Dunsky, Hisashi Matsumoto, Hisashi Matsumoto, } "Precision microfabrication with Q-switched CO2 lasers", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486600; https://doi.org/10.1117/12.486600


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