Paper
17 February 2003 Application of the moire interferometry to thermal strain analysis for electronics packaging
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Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474040
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
Abstract
The moire interferometry has been used to investigate the strains induced by thermal loading in various electronics packages. The AFM scanning moire technique has also been utilized to measure the strains of electronics packages with an even better resolution. The advantages and disadvantages of the full field moire, the micro moire, and the AFM scanning moire techniques are compared.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhaowei Zhong "Application of the moire interferometry to thermal strain analysis for electronics packaging", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474040
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Cited by 2 scholarly publications.
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KEYWORDS
Atomic force microscopy

Electronics

Deflectometry

Packaging

Strain analysis

Moire patterns

Silicon

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