17 February 2003 Characterization of BaTiO3 thin films fabricated by sol gel method
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Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474833
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
Abstract
Barium titanate sol was prepared using barium 2-ethyl-hexanoate and titanium isopropoxide. The sol was then spin coated on Si (100) and MgO (100) substrates and annealed at different temperatures to give polycrystalline, transparent, and crack free films. The surface morphology and structural properties of the film were studied using X-ray diffraction (XRD), Rutherford Backscattering Spectroscopy (RBS) and, Scanning Electron Microscopy (SEM).
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Daniel Hernandez Cruz, Daniel Hernandez Cruz, Roger A. Lessard, Roger A. Lessard, } "Characterization of BaTiO3 thin films fabricated by sol gel method", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); doi: 10.1117/12.474833; https://doi.org/10.1117/12.474833
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