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17 February 2003 A Low-voltage high-torque two-degree-of-freedom scanning micromirror for ECOM applications
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Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474303
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
Abstract
This paper presents a novel 2D-scanning micro-mirror used in ECOM for in vivo and in situ tissue imaging using MEMS technology. The 2D scanner accomplishes Raster Scanning with just one mirror. The size of the mirror is 1mm by 1mm and is rotated about two axes giving it two degree of freedom. The scanning mirror is actuated electrostatically. The inherent disadvantages of electrostatic actuation such as high crosstalk between electrodes, and large nonlinearity in voltage to angle relationship are systematically addressed. In the context of biomedical applications, it is desirable to minimize the driving voltage requirements of the electrostatic actuators while maintaining the same scan angle. The optical scanner described in this paper is capable of generating large scan angles with low driving voltages, thus making it highly suitable for biomedical imaging.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tze-Wei Yeow, K. Y. Lim, B Wilson, and Andrew A. Goldenberg "A Low-voltage high-torque two-degree-of-freedom scanning micromirror for ECOM applications", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474303
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