Tunable thin-film filters based on thermo-optic semiconductor films

Lawrence H. Domash; Eugene Y. Ma; Nikolay Nemchuk; Adam Payne; Ming Wu

doi:10.1117/12.474383

17 February 2003 Tunable thin film filters based on thermo-optic semiconductor films

Lawrence H. Domash, Eugene Y. Ma, Nikolay Nemchuk, Adam Payne, Ming Wu

Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474383
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada

Abstract

Thermo-optic layers of thin film semiconductors are deposited by PEVCD to create thermally tunable bandpass filters for WDM optical networks. Amorphous semiconductor films, adapted from the solar cell and display industries, are the primary ingredient. Single-cavity tunable filters with FWHM=0.085 nm, >40 nm tuning range, and insertion losses 0.2-4 dB are demonstrated. Key enablers for this new family of index-tunable thin film devices are PECVD deposition, large internal temperature changes >400C, high conductivity polysilicon heater films, and extremely robust film adhesion. Possible applications include optical monitoring, add/drop multiplexing, dynamic gain equalization, and dispersion compensation.

Citation Download Citation

Lawrence H. Domash, Eugene Y. Ma, Nikolay Nemchuk, Adam Payne, and Ming Wu "Tunable thin film filters based on thermo-optic semiconductor films", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available