Micro-deformable mirror for next-generation adaptive optical systems

Frederic Zamkotsian; Henri Camon; Norbert Fabre; Veronique Conedera; Gabriel Moreaux

doi:10.1117/12.458845

7 February 2003 Micro-deformable mirror for next-generation adaptive optical systems

Frederic Zamkotsian, Henri Camon, Norbert Fabre, Veronique Conedera, Gabriel Moreaux

Proceedings Volume 4839, Adaptive Optical System Technologies II; (2003) https://doi.org/10.1117/12.458845
Event: Astronomical Telescopes and Instrumentation, 2002, Waikoloa, Hawai'i, United States

Abstract

Next generation giant telescopes as well as next generation instrumentation for 10m-class telescopes relies on the availability of highly performing adaptive optical systems. Different types of AO systems are currently under study, including Multi-Conjugate AO (MCAO), high dynamic range AO, and low-order AO for distributed partial correction AO. These systems require a large variety of deformable mirrors with very challenging parameters. The development of new technologies based on micro-opto-electro-mechanical systems (MOEMS) is promising for future deformable mirrors. The major advantages of the micro-deformable mirrors (MDM) are their compactness, scalability, and specific task customization using elementary building blocks. We are currently developing a MDM based on an array of electrostatic actuators with attachments to a continuous mirror on top. A high optical quality mirror is the most challenging building block for this device. The originality of our approach lies in the elaboration of a sacrificial layer and of a structural layer made of polymer materials. With this structure, very efficient planarization has been obtained: the long-distance flatness is below 0.2 μm, the print-through of localized 9μm steps is reduced to below 0.5μm and a rms roughness of 15 nm has been measured over the surface. The integration of this mirror surface on top of an actuator array is under investigation.

Citation Download Citation

Frederic Zamkotsian, Henri Camon, Norbert Fabre, Veronique Conedera, and Gabriel Moreaux "Micro-deformable mirror for next-generation adaptive optical systems", Proc. SPIE 4839, Adaptive Optical System Technologies II, (7 February 2003); https://doi.org/10.1117/12.458845

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