30 January 2003 Vibration-insensitive interferometric measurements of mirror surface figures under cryogenic conditions
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Abstract
We report on a technique to measure the surface figure of mirrors under extreme vibrational conditions. Measurements are presented of the surface figure changes of Zerodur primary mirrors with both spherical and parabolic shapes, manufactured for the NASA Deep Impact program. Conditions ranged from room temperature to 130K. The interferometer was located outside the cryogenic vacuum chamber and did not require any active or passive vibration isolation. We show measurement repeatability of better than 1/500 waves RMS at 633nm.
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James E. Millerd, James E. Millerd, Neil J. Brock, Neil J. Brock, James W. Baer, James W. Baer, Peter T. Spuhler, Peter T. Spuhler, } "Vibration-insensitive interferometric measurements of mirror surface figures under cryogenic conditions", Proc. SPIE 4842, Specialized Optical Developments in Astronomy, (30 January 2003); doi: 10.1117/12.461352; https://doi.org/10.1117/12.461352
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