27 August 2003 Carbon dependence of the vibrational modes frequencies in Si1-x-yGexCy alloys
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Abstract
A detailed study of the dependence of the vibrational modes in rapid thermal chemical vapour deposited Si1-x-yGexCy on substitutional carbon concentration has been undertaken. The difficulty in incorporating substitutional carbon in these alloys with concentration higher than a few tenths of an atomic percent is well known. It is shown that simultaneous analysis of X-ray diffraction, infrared absorption and Raman scattering measurements can be used to determine the fraction of substitutional carbon from the total carbon content. The frequency shifts of the carbon local modes and the Si-Si modes have been studied in addition to the intensity dependence of the former. The evolution of the carbon satellite peaks and their dependence on total carbon concentration has also been studied. Good numerical agreement with other previously published results has been obtained.
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Tatiana S. Perova, Francoise Meyer, Daria Potapova, Alan Moore, "Carbon dependence of the vibrational modes frequencies in Si1-x-yGexCy alloys", Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); doi: 10.1117/12.463675; https://doi.org/10.1117/12.463675
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