Back to square 9: a demonstration of 9-in. reticle capablilty

Kevin D. Cummings; Ludger U. Schneider-Stoermann; Ute Buttgereit; Mathias Irmscher; Dietmar Mueller; Peter Hudek; Dirk Beyer; Bernd Brendel; John M. Whittey; Benjamin George Eynon Jr.; Jason Harsch; Chris Constantine; Kirk Miller

doi:10.1117/12.467495

27 December 2002 Back to square 9: a demonstration of 9" reticle capability

Kevin D. Cummings, Ludger U. Schneider-Stoermann, Ute Buttgereit, Mathias Irmscher, Dietmar Mueller, Peter Hudek, Dirk Beyer, Bernd Brendel, John M. Whittey, Benjamin George Eynon Jr., Jason Harsch, Chris Constantine, Kirk Miller

Author Affiliations +

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.467495
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

This work involved a demonstration of the infrastructure and the ability of mask-making equipment to produce 9 inch reticles. While the choices for this particular work made the timing and logistics long and complicated, we find that there currently exists adequate infrastructure to create 9 inch reticles and we have used this ability to produce several demonstration quality examples.

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Kevin D. Cummings, Ludger U. Schneider-Stoermann, Ute Buttgereit, Mathias Irmscher, Dietmar Mueller, Peter Hudek, Dirk Beyer, Bernd Brendel, John M. Whittey, Benjamin George Eynon Jr., Jason Harsch, Chris Constantine, and Kirk Miller "Back to square 9: a demonstration of 9" reticle capability", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.467495

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