Back to square 9: a demonstration of 9-in. reticle capablilty

Kevin D. Cummings; Ludger U. Schneider-Stoermann; Ute Buttgereit; Mathias Irmscher; Dietmar Mueller; Peter Hudek; Dirk Beyer; Bernd Brendel; John M. Whittey; Benjamin George Eynon; Jason Harsch; Chris Constantine; Kirk Miller

doi:10.1117/12.467495

27 December 2002 Back to square 9: a demonstration of 9" reticle capability

Kevin D. Cummings; Ludger U. Schneider-Stoermann; Ute Buttgereit; Mathias Irmscher; Dietmar Mueller; Peter Hudek; Dirk Beyer; Bernd Brendel; John M. Whittey; Benjamin George Eynon; Jason Harsch; Chris Constantine; Kirk Miller

Author Affiliations +

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.467495
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

This work involved a demonstration of the infrastructure and the ability of mask-making equipment to produce 9 inch reticles. While the choices for this particular work made the timing and logistics long and complicated, we find that there currently exists adequate infrastructure to create 9 inch reticles and we have used this ability to produce several demonstration quality examples.

Citation Download Citation

Kevin D. Cummings, Kevin D. Cummings, Ludger U. Schneider-Stoermann, Ludger U. Schneider-Stoermann, Ute Buttgereit, Ute Buttgereit, Mathias Irmscher, Mathias Irmscher, Dietmar Mueller, Dietmar Mueller, Peter Hudek, Peter Hudek, Dirk Beyer, Dirk Beyer, Bernd Brendel, Bernd Brendel, John M. Whittey, John M. Whittey, Benjamin George Eynon, Benjamin George Eynon, Jason Harsch, Jason Harsch, Chris Constantine, Chris Constantine, Kirk Miller, Kirk Miller, } "Back to square 9: a demonstration of 9" reticle capability", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.467495; https://doi.org/10.1117/12.467495

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years