27 December 2002 Digital Image Processor for Complex Shape Metrology
Author Affiliations +
In this paper, we apply image-processing techniques to the task of metrology on complex shapes. We describe techniques for noise reduction, edge detection, and feature contour extraction on scanning electron microscope images. We present a novel capability for calculating the area of an arbitrary shape. We demonstrate imaged based metrology capabilities using examples encountered in photomask processing.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qi-De Qian, Qi-De Qian, } "Digital Image Processor for Complex Shape Metrology", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.467779; https://doi.org/10.1117/12.467779

Back to Top