27 December 2002 Digital Image Processor for Complex Shape Metrology
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Abstract
In this paper, we apply image-processing techniques to the task of metrology on complex shapes. We describe techniques for noise reduction, edge detection, and feature contour extraction on scanning electron microscope images. We present a novel capability for calculating the area of an arbitrary shape. We demonstrate imaged based metrology capabilities using examples encountered in photomask processing.
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Qi-De Qian, Qi-De Qian, } "Digital Image Processor for Complex Shape Metrology", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.467779; https://doi.org/10.1117/12.467779
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