29 July 2002 Diffraction method for checking the sidebar defects of a small round hole
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484599
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
A high-sensitive method for detection and determination of the geometrical parameters of round hole sidebar defects, based on solution of inverse problem of diffraction of laser radiation on the given hole is considered. The principle of solution is analysis of the general and fine structure of diffraction patterns by means of geometrical theory of diffraction.
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Vitaly G. Magurin, Vitaly G. Magurin, Vladimir Alexeevich Tarlykov, Vladimir Alexeevich Tarlykov, } "Diffraction method for checking the sidebar defects of a small round hole", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484599; https://doi.org/10.1117/12.484599
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