Ellipsometric measurements of the optical constants of solids under impulse heating

V. A. Shvets; Nikolay N. Mikhailov; M. V. Yakushev; E. V. Spesivtsev

doi:10.1117/12.484591

29 July 2002 Ellipsometric measurements of the optical constants of solids under impulse heating

V. A. Shvets, Nikolay N. Mikhailov, M. V. Yakushev, E. V. Spesivtsev

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484591
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

We present a novel technique for estimation of temperature dependence of optical constants from ellipsometric measurements. We suggest making measurements during short-time impulse heating using high-speed single-wavelength ellipsometer. In this way we can eliminate or reduce significantly the influence of thermal oxidation or surface decomposition on measured results. For temperature monitoring we have used a ZnTe/GaAs heterostructure with high sensitivity of ellipsometric parameters to the temperature. Our measurements show impulse-to-pulse reproducibility of the temperature well within ±5°C Using this technique we determined the temperature dependence of optical constants for mercury cadmium telluride (MCT) compounds from room temperature up to 250°C.

Citation Download Citation

V. A. Shvets, Nikolay N. Mikhailov, M. V. Yakushev, and E. V. Spesivtsev "Ellipsometric measurements of the optical constants of solids under impulse heating", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484591

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