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29 July 2002 Ellipsometric measurements of the optical constants of solids under impulse heating
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484591
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
We present a novel technique for estimation of temperature dependence of optical constants from ellipsometric measurements. We suggest making measurements during short-time impulse heating using high-speed single-wavelength ellipsometer. In this way we can eliminate or reduce significantly the influence of thermal oxidation or surface decomposition on measured results. For temperature monitoring we have used a ZnTe/GaAs heterostructure with high sensitivity of ellipsometric parameters to the temperature. Our measurements show impulse-to-pulse reproducibility of the temperature well within ±5°C Using this technique we determined the temperature dependence of optical constants for mercury cadmium telluride (MCT) compounds from room temperature up to 250°C.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. A. Shvets, Nikolay N. Mikhailov, M. V. Yakushev, and E. V. Spesivtsev "Ellipsometric measurements of the optical constants of solids under impulse heating", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484591
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